Robust high-precision control of a piezoelectric-actuated nano-positioner with hysteresis compensation

In this paper, a modified Prandtl-Ishlinskii (MPI) model is adopted to describe the asymmetric hysteresis of piezoceramic actuators (PCAs), where a one-side play (OSP) operator is used. The benefit for the improved MPI model lies in the fact that an analytic inverse model of the classical Prandtl-Ishlinskii (CPI) model can be directly applied for the inverse compensation. In order to achieve high precision manipulations of the piezoelectric actuated nano-positioner, a robust control architecture incorporating an H_∞ controller is combined with feedforward hysteresis inverse compensator. Finally, simulations and real time experiments are deployed to demonstrate the effectiveness of the proposed method.