Compact modeling of a parabolic cross section nano-FinFET

The model for current and manufacture of a moderately doped nanoscale FinFETs with parabolic cross section is proposed. The model of trapezoid FinFETs is extended to parabolic FinFETs, furthermore diminishing corner effects. The model is proved by comparing the results of present trapezoidal FinFET with Parabolic FinFET having similar parameters. The advantage of high drive current and transconductance makes the proposed model suitable for implementation in circuit simulation tools.