Silicon MEMS for two different light sources

The semiconductor silicon is known as the material which is not suitable for the light source. Outside the visible light region, we try two different light sources. One is the infrared light source. The surface plasmon polariton is combined with the basic thermal emission from the microheater for the wavelength selectivity. Another is vacuum UV light source using the atmospheric pressure plasma. The wavelength is decided by the gas species mixed together in He discharging gas. In both devices, MEMS structures play the important roles for the efficiency.