Magnetic Properties of Ferromagnetic Microstructured Multilayer Films

A series of microstructured FeNi/SiO
₂
/FeCoSiB striped multilayers and FeNi/SiO
₂
/FeCoSiB continuous multilayers were fabricated on a Si(111) substrate by magnetron sputtering and ultraviolet photolithography. High-frequency permeability spectra have double resonance peaks, and the higher resonance peaks can be adjust from 2.5 GHz to 4.8 GHz. The results may be applied to new devices that require controlled, high-permeability resonance bands.