Analysis of spurious modes suppressed on inverted mesa quartz resonators

The application of etching methods to manufacture high-frequency quartz plates has increased in recent years. Such methods are able to produce thinner quartz components than traditionally cutting methods. The present study used finite element software to simulate quartz plates with different inverted mesa structures and peripheral electrode setups to observe their spurious frequency suppression effects. Findings showed that the addition of peripheral electrodes effectively reduced the effects of spurious frequency.