Ultra-high resistance measurement based on non-contact electrostatic voltmeter

In order to overcome the drawback that the measurement uncertainty of the ultra-high resistance over 10¹⁴ Ω may be deteriorated severely due to insufficient resolution of the electrometer in conventional scheme, a novel method based on the dual sources high resistance bridge and non-contact voltage measurement is presented. The measurement uncertainty is largely dependent on the standard resistance and determined by the resolution of the electrostatic voltmeter. It is shown by the experimental results that the measurement uncertainty for the resistance of 100 TΩ to 1000 TΩ is better than 0.2%, k = 2.