RF test and thermal analysis on high power waterload for 30 kW microwave of 2450 MHz applications

Summary form only. Atmospheric microwave-induced plasma sources have been favored for industrial material processing and decontamination applications due to their many advantages of inexpensiveness, simplicity and easiness of operation1–3. High power waterload with a cone-shaped quartz is designed, fabricated and rf tested to absorb and terminate high power for 30 kW power handling at 2450 MHz microwave systems. The waterload consists of WR340 rectangular waveguide with a cone-shaped quartz installed vertically and a tuning button on the bottom of waveguide. The relative dielectric constant and thickness of the quartz tube is 3.8 and 6 mm, respectively. The reflection coefficients of the waterload obtained from HFSS and measured by Vector Network Analyzer at the operating frequency of 2450 MHz are −35 dB and −32.3 dB, respectively. Thermal analysis is done by using ANSYS CFX program for efficient water cooling and circulation inside the waterload. In this paper, we present detailed design and low power rf test results of the high power waterload. High power RF test results and heat flux distributions in the waterload will be shown.