Measurements of electron density in different low pressure plasmas using the multipole resonance probe, langmuir probe and optical emission spectroscopy

Summary form only given. A young diagnostic tool - the Multipole Resonance Probe (MRP) - is used to determine the plasma density and electron temperature. In recently publication¹, the probe, which is based on active plasma resonance spectroscopy (APRS), was simulated and evaluated for different devices. The special probe's design creates a geometrical and electrical symmetry, which simplifies significantly the APRS model, so that the relation between measured resonance frequency and electron density is described by a simple formula.