Acceleration characterization of dual purpose gyro/accelerometer device using MS3110 differential capacitive read out IC

Chip size is an important factor considered for implementation in any system for navigational aid. Dual purpose device such as gyro/accelerometer has increased the interest of researchers to reduce the size of the chip, while serving both the functions of gyroscope and accelerometer. This paper presents the design, dynamics and experimental characterization of the acceleration response of 2-DOF drive mode and 1-DOF sense mode with inner anchoring gyroscope structure. It has been demonstrated that the same structure can be used for acceleration measurement as well; hence it can be regarded as gyro/accelerometer. Testing has been carried out by interfacing the sensor chip with MS3110 differential capacitive read out IC and evaluation board. An out-of-plane shaker (make-LDS) was used to produce vibrations with a sinusoidal profile to characterize the sensors.