eNVM Technologies Scaling Outlook and Emerging NVM Technologies for Embedded Applications

In this paper, scaling prospects and challenges of existing embedded non-volatile memory (eNVM) technologies are discussed. The impact of both lateral and vertical memory cell scaling on performance and reliability will be described for various types of nitride based and floating gate embedded NVM cells. Different types of emerging NVM technologies will also be discussed as potential options to replace traditional NVM technologies in embedded applications for sub-20nm process nodes and beyond.