Design of multi-layer fractal inductor for RF applications

Multilayered spiral inductor using fractal geometry is proposed. The proposed inductor achieves a high Q factor (Q) of 24.25 at a frequency of 19GHz with 43.5GHz as self resonant frequency (SRF). Design and EM simulations are performed by using high frequency structural simulator (HFSS) for 0.18μm TSMC technology. The results show 84.72% higher Quality factor than planar inductor with no negligible degradation in inductance value for over planar inductors. The results also show an 80% increase in SRF over planar inductor.