Development of micromachined electrochemical sensor and portable meter system

An integrated microsensor has been designed and developed by using standard semiconductor technology and post-processing by micromachined procedures. The microsensor is implemented by using the UMC 0.5 /spl mu/ CMOS technology with a die size of 1.0 mm/spl times/1.0 mm. The microsensor consists of a two-electrode electrochemical cell, current-to-voltage converter and operational amplifier. The electrode area is 600 /spl mu//spl times/800 /spl mu/. The complete system contains a microsensor strip, a single chip microprocessor (80C196KC) and a LCD for portable instrument prototype. The system is capable of both amperometric and cyclic voltametric measurement for continuous monitoring and detail analysis of electrode response.