Future directions for DRAM memory cell technology

The development trend and concerns of cell technologies are reviewed, and future actions for DRAM cell and process module are discussed. The BEST cell and the BST cell are promising for giga bit era DRAM. The BEST cell has simple and robust processes, and the conventional capacitor dielectric film is available. The BST film development is the key to realizing giga bit era DRAM by using BST cell.