Monitoring of low pressure plasmas with a calibrated probe

In this contribution the use of the planar multipole resonance probe (pMRP) as a monitoring tool for low pressure plasmas is presented. By 3D electromagnetic simulations, the probe's ability to monitor two important plasma parameters is investigated and a full one-port calibration is applied to ensure maximum monitoring precision. Measurements in a double inductively coupled argon plasma confirm the simulation results and prove the suitability of the calibrated pMRP for precise plasma monitoring.