A System Decomposition Model for Phase Noise in Silicon Oscillating Accelerometers

A phase noise model is proposed for silicon oscillating accelerometers (SOAs), which can be used to estimate the frequency noise from the accelerometer. This model treats the SOA as a time-varying system and employs a unified approach to decompose the physical system into phase and amplitude modulation paths to predict the phase noise in SOA. Furthermore, the model also reveals the relationship between mechanical displacement amplitude and design specifications, which can serve as a guideline for performance optimization. The soundness of this model has been validated against both time-domain numerical simulations and experimental results. This model is also applicative in microelectromechanical-system (MEMS) oscillators and MEMS oscillator-based sensors.