Safety relevant microsystems for automotive applications

In this paper an outline of current microsystem activities at Temic in the area of safety relevant automotive applications is given. One of the primary applications is the deployment of the airbag. New sensor concepts concerning single and multiaxial micromachined silicon accelerometers are shown. This includes a resonant principle for signal readout from the sensor, where a frequency shift of 70 Hz/g could be verified. A monolithic, triaxial sensor is presented, that can satisfy demands for future applications, including roll-over detection. This sensor includes an ongoing self-consistency function. For roll-over detection a low cost angular rate sensor is required, additionally. Gyroscopic sensors of similar kind are also being applied for motion control in advanced dynamic driving control systems. The current generation of a tuning fork quartz sensor from Temic is presented. It basically measures the Coriolis force. Furthermore, a silicon sensor currently under development at Daimler-Benz Research is shown.