Low-Loss InGaAsP/InP Surface Ridge Waveguides for Photonic Integrated Circuits

We demonstrate low-loss InGaAsP/InP surface ridge waveguides with loss as low as 0.81 dB/cm measured at 1550 nm for the fundamental TE mode. These waveguides are suitable for monolithic integration with active elements in InP-based photonic integrated circuits. We study the effect of proton implantation on waveguide loss for different ridge widths.