Electrooptical measurement system for the DC characterization of visible detectors for CMOS-compatible vision chips

An electrooptical measurement system for the dc characterization of visible detectors for CMOS-compatible vision chips is presented, which can help designers to characterize these detectors. The measurement system has been designed to be versatile, fast, and easily expandable and used. Two different setups for the measurement of the spectral response and the optical dynamic range of the detectors are described in detail. Measurements of the spectral response are done with a fully computer-controlled setup, avoiding tedious and inaccurate measurements. A description of the different detectors available in a CMOS process is also given, together with the parameters affecting their response and a set of test structures which can be useful for the characterization of the detectors.