P4 probe card-a solution for at-speed, high density, wafer probing

We introduce a promising new probe card technology the P4 (Photolithographic Pattern Plated Process) probe card-which offers a solution for at-speed wafer probe at high pin count applications. We describe the P4 probe card, highlight some of its features such as its unique construction, which allows it to perform with the robustness of an epoxy-ring probe card on aluminum pads, yet enables high frequency probing up to 9 GHz bandwidth. We present data on the electrical and mechanical characteristics of the P4 probe card such as bandwidth, crosstalk, contact resistance and probe tip force/deflection performance.