Stochastic method for disk resonating gyroscope mode matching and quadrature nulling

This work describes a new method for mode-matching and quadrature nulling of a MEMS wineglass mode gyroscope utilizing particle swarm optimization. Use of the derivative-free optimization scheme allowed for multiobjective optimization of gyroscopic performance parameters. Modal frequency split, quadrature and amplitude of both mode shapes were optimized through this method. Optimization greatly increased the scale factor of the sensor as well as enhanced the noise performance for all device geometries and materials studied. The stochastic nature of our method allowed robust calibration for devices of varying geometry and resonator material.