Electrothermal MEMS fiber scanner with lissajous patterns for endomicroscopic applications

We report an electrothermal MEMS fiber scanner with Lissajous patterns for endomicroscopic applications. The MEMS fiber scanner consists of a double hot arm structure, and a directly mounted optical fiber. The mounted single mode optical fiber moves to angled direction due to both lateral and vertical force of MEMS fiber scanner due to Joule heating. Besides, top silicon structure makes resonance separation of the single mode fiber in lateral, and vertical directions. Resonance frequency separation allows two-dimensional Lissajous scanning without any additional structures, and Lissajous patterns were successfully obtained within 16 Vpp. This scanner can give a new direction for compact and cost-effective endomicroscopic catheter.