Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow (T2MCF) sensor by using a commercial 0.35μm 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of T2MCF sensor under different ambient temperatures Ta of 22°C~48°C showed the excellent temperature insensitive output with the maximum normalized variation of 0.5%. Compared to the uncompensated counterpart (49%), it demonstrates our robust T2MCF sensor design is applicable for the integration of on-chip CMOS electronics for the Internet of Things.