Integrated microphone with CMOS circuits on a single chip

Summary form only given. The first integration of a microphone together with CMOS circuits on a single chip has been demonstrated. It was found that the processes needed to make the microphone can be articulated with a commercial CMOS fabrication line. The microphones, squares 2 mm on a side, were fabricated by combining micromachining procedures (to produce a thin silicon-nitride diaphragm) with ZnO thin-film layers which are used as piezoelectric transducers. The circuits integrated with the microphones consist mainly of several configurations of analog standard cells that were designed and proven for building-block applications. The frequency responses of the integrated microphones are plotted.<>