MEMS based design and analysis of a biosensor for detection of hepatitis virus

In this paper we design a novel piezoelectric MEMS biosensor for the detection of hepatitis virus. A PZT-5A piezoelectric based poly-silicon cantilever of length 500 μm × 100 μm × 7 μm is used in the model which is actuated by electromagnetic induction for sensing changes in mechanical vibrations caused by adsorption of virus of the order of pg of sample mass at the tip of cantilever, producing an output signal at different resonant frequencies. A COMSOL model for the MEMS based piezoelectric biosensor generate 1.051×10-4 V and shows high sensitivity to changes in attached mass at the tip. The results strongly indicate the reliability of designed biosensor for detection of Hepatitis viruses.