Surface Micro-machined high gain cavity-backed patch antenna array for 60GHz radios

A high gain cavity-backed circular patch antenna array is designed by using surface micromachining technology. The antenna array is fed by eight-ways power divider, which is designed by using rectangular micro-coaxial transmission line. The antenna array with the specified size of 18.5mm×9.76mm×0.36mm and bandwidth shows around 6 GHz (59∼65GHz) under the condition of voltage standing wave ratio (VSWR) less than 2, which covers China and Australia standard of frequency range. Gain of the antenna array is up to 18.2 dBi gain at 61.5GHz, and the efficiency achieves 85%.