One computer-aided equivalent circuit model of a MEMS phase detector applied in phase locked loops

This paper focuses on a computer-aided equivalent circuit model of a MEMS phase detector and applies it in a phase locked loop (PLL). Low-pass filter which is essential in a traditional PLL is omitted for the output of the MEMS phase detector is dc voltage. The electric-thermal-electric conversion inside the phase detector is illustrated in circuit terms and is realized in the incorporation in PLL. Measurement verification for this equivalent circuit model of the MEMS phase detector is conducted. Simulations of the PLL are also processed. The simulated output frequency of the VCO is synchronized with the reference frequency.