Metal-metal terahertz quantum cascade laser with hybrid mode section

A hybrid mode section is integrated into the end of the metal-metal (MM) waveguide of a terahertz (THz) frequency quantum cascade laser (QCL) by removing sub-wavelength portions of the top metal layer. This allows a hybrid mode to penetrate into the air, which reduces the effective index of the mode and improves the out-coupling performance at the facet. The transmission of the processed metal-metal hybrid section (MMHS) waveguide is further increased by ensuring its length fulfills the criterion for constructive interference. These simple modifications to a 2.5 THz MM QCL waveguide result in a significant increase in the output emission power. In addition, simulations show that further improvements in out-coupling efficiency can be achieved for lower frequencies with effective refractive indices close to the geometric mean of the indices of the MM waveguide and air.