A terahertz diagonal multi-layer horn antenna based on MEMS technology

A terahertz(THz) diagonal multi-layer horn antenna is proposed. The proposed antenna is composed of several silicon layers, monolithically fabricated by dry etching, and sputtering gold and gold-gold thermo-compression bonding. The input return loss shows a level below -8dB from 480 to 500GHz. The gaussicity of radiation patterns at the working band is calculated to be 92%. The proposed antenna exhibits asymmetric beamwidths of 13° in the E- and H-planes, and sidelobes below 15dB, along with a 22 dB gain. The proposed THz waveguide-fed proposed antenna is suitable for THz imaging and detection systems.