Pd Schottky barrier photodetector integrated with LOCOS-defined SOI waveguides

Palladium on n-type silicon Schottky barrier photodetectors have been integrated with SOI optical waveguides. The diodes gave optical responsivity of 330 nA/mW at 1310 nm. Dark current density is less than 2×10^-8 Acm^-2 at 1 volt reverse bias.