300 GHz InP rectangular cavity antenna

A rectangular cavity antenna design for terahertz integrated circuits is presented. The antenna is built in a 75 µm-thick InP substrate with a dielectric constant of 12.5. Thick substrates often cause unwanted substrate modes that severely hamper radiation efficiency. Our proposed cavity antenna design, however, overcomes the substrate mode problems and utilizes the dominant TE101 mode to maintain better than 70 percent of radiation efficiency across 41 GHz bandwidth at 300 GHz.