Micromachined Optical Components Integrated With Photodiode

Si micromachining gives new optical component integrated with the semiconductor device. The optical component including the photodetector is ideal enabling the beam intensity monitor without additional elements. For the function of some optical components (e.g. grating, pinhole), the mechanical structure is important. Si micromachining technology can offer the accurate mechanical structure. In this study, we have fabricated the transparent position sensor and the pinhole integrated with the photodiode.