Silicon Micromachined Vacuum Encapsulated Resonant Pressure Sensors

Silicon micromachined vacuum encapsulated resonant pressure sensors have been realized and have given several significant solutions for the problems by which the conventional metallic bulk machined resonant sensors have been worried. The problems includes the interference from environmental fluids where resonators are exposed. The interference reduces the quality factor of the resonator and alters the resonant frequency of the resonator. In this paper describes the solutions for the problems by silicon micromachined vacuum encapsulated resonant sensors.