High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines

Thermal deformation waves in a soda-lime-silica glass substrate were measured using high-speed Hilbert-phase interferometry during interconnect heating and Q-switched Nd:YAG irradiation. 100-microsecond thermal events were captured with 256×256 resolution over a 100 micron square area.