Finite element modeling of plasma initiation by carbon nanotubes (CNTs) as cold cathode in pseudospark switch

In this research the behavior of a novel carbon nanotube (CNT) cold cathode plasma switch is investigated via a finite element simulation. The model is based on an experimental 10-mTorr Argon plasma switch using a 500 V DC power supply. The novelty of the switch is the use of CNTs as a cold cathode electron trigger. CNTs have very low turn-on voltage and a relatively high saturation current density making them ideal for cathode materials. A room temperature fluids model of the plasma is used that simultaneously solves Maxwell's equations, the continuity equation, and the Navier-Stokes equations. The sensitivity of the electron density profile to chamber geometry is also investigated and optimized design dimension of pseudospark switch presented.