Hybrid flexure-based multi-level mechanism design supporting centimeter stroke nano manipulator

In recent years, flexible micro/nano-positioning stages are designed to achieve large stroke and ultra-high precision. This paper proposes a novel hybrid flexure hinge and flexure-beam multi-level mechanism design which is able to achieve centimeter stroke nano-positioning. The important features of the proposed design lie in: a multi-level mechanism consists of flexure hinges and beam flexure; a compact size (about 100×100mm) is able to achieve a centimeter stroke. The unique building block is analyzed, and verified by an FEA method. The simulation results show that the parasitic motion is linear to the displacement, and is 0.55% of the stroke. The manufacturing of the proposed design can be conducted by resorting additive manufacturing such as 3D printing.