Conductive reliability modelling of capacitive MEMS

Conductive reliability modelling of Capacitive MEMS appears to be a problem of extent complexity due to the presence of the various components of which the system consists. In the current work we discuss a multi-physics modelling which includes all the aspects of the system. Additionally, we provide simulations through an implementation example of a MEMS with a floating electrode which includes a time dependent electromechanical part along with an embedded dynamical model of the current flux in the device. Finally, we compare our results with experimental data.