Radiation response of ADVANTOX/sup TM/-190 SOI material

Summary form only given. In this paper, we describe the material properties and radiation properties of ADVANTOX/sup TM/-190 SOI material. This is a new ADVANTOX/sup TM/ with a thicker BOX at 190 nm. The ADVANTOX/sup TM/-190 SOI material has similar physical properties to ADVANTOX/sup TM/-120, such as low HF defect density and low dislocation density. Partially depleted SOI CMOS devices were fabricated to evaluate the radiation and speed performance of this new SOI material.