Implementation experience of automated guided vehicle system in an IC foundry fab around SMIF environment

Taiwan Semiconductor Manufacturing Company (TSMC) is a pure foundry fab designed around SMIF environment. To shorten the learning curve of fully automated transfer system for 12" wafer fab, we installed a pilot intrabay system using automated guided vehicles system (AGVS) in TSMC photo area. It is challenging to implement fully automated system in an IC foundry fab. Many factors have to be considered-high on-time performance, short cycle time and low cost manufacturing. However, there are variable product mixes, lots of products, diversified equipment constraints and specified process requirements in a typical wafer foundry fab. In addition, the operation and safety environment should also be well designed for AGVS. In this paper, our AGVS implementation experience and approach considering the above issues is introduced. Furthermore, the improvement in fab operation through installing this system is shown.