TSS: a daily production target setting system for fabs

In this paper, a Target Setting System (TSS) is designed as a computer aided decision support, which includes three modules: (1) Master Production Schedule Conversion (MPSC), (2) Capacity Estimation, and (3) Target Setting Main Function (TSMF). MPSC converts wafer release and output schedule into daily demanded moves of each production stage while CE estimates tool capacity by taking auto-regression of the actual move data. TSMF then takes the outputs of MPSC and CE and WIP distribution as its inputs, and adopts PULL, PUSH and iterative proportional capacity allocation schemes to calculate the daily target of each stage. TSS has been implemented for daily application. The scheduled total moves by TSS are within 5% of what have been actually achieved on the shop floor and about 50% of scheduled stage targets are within 15% difference with actual stage moves.