Design and electro-thermal analysis of micro hotplates for chemical sensors using standard multi user MEMS process

Micro Hotplates are extensively used in chemical sensor, flow sensor and other micro systems. In this paper, we have presented the design, modeling and simulation results of serpentine, spiral and fan shape micro heaters based on standard Multi User MEMS Process for fabrication in a multi product wafer run. The heater structure was optimized to get good temperature homogeneity, low power consumption and better thermal isolation. Considering the power consumption and temperature homogeneity, spiral type heater with non-uniform width was observed to be the best choice among the three types of heater geometries.