Silicon Microvalves For Gas Flow Control

Four silicon gas valve technologies have emerged in the past decade and are beginning to compete with conventional solenoid valves. In some applications including proportional control they offer superior flow characteristics, smaller size, smaller weight, or a combination of these advantages. This paper describes the four valve technologies (scaled fluid capsule expansion, aluminum/silicon bimetal, shape-memory alloy, and nickel/silicon bimetal) which have demonstrated