Calculation Of Series Resistance Of MISFETS Using Schwartz-Christoffel Transformation

The source and drain resistance of MISFETs can be calculated by means of Schwartz Christoffel transformation. This method, in general, can be applied to calculate the series resistance between two perpendicular electrodes such as those in MESFETs, MISFETs and thin film capacitors. The calculation shows that the series resistance due to current crowding can be many times larger than that calculated from multiplying the sheet resistance by the number of squares of diffusion.