Digital super-resolution interference microscopy (DiSRIM)

Digital super-resolution interference microscopy (DiSRIM) based on an optical interference measurement and a complex-amplitude pattern matching method is a method for observing nanostructures beyond the diffraction limit of light. The fundamental property of this method is investigated form a size measurement of a single rectangular convex element with a height and width less than 100 nm under an illumination with a wavelength of 400 nm. The height and width of the rectangular convex element were identified with the mean absolute error (MAE) lower than 1nm under the presence of random noises with a peak signal-to-noise ratio (PSNR) of 50dB. The MAE for the width was a little smaller than that for height. We found the interesting phenomena that the height can be detected with lower error than the width when the element size was more than ~ 50nm, but the tendency reversed and the detection of the width had a little bit lower error when the size was smaller than ~ 50nm. We also found that the position was detected with small dependency on the element size.