MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time

An inertia switch with flexible carbon nanotubes and copper (CNTs/Cu) composite array layer between movable and fixed electrodes has been designed, fabricated and characterized, which achieved long contact time compared to the traditional design using rigid-to-rigid impact between electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic response of the designed inertia switch and the contact impact between single CNT and fixed electrode/another CNT have been both simulated by ANSYS finite element method. Finally, the fabricated MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes has been evaluated using a dropping hammer system. The test contact time is about 112µs, which has a good agreement with the simulation and is much longer than that of the traditional design.