Measurement of elastic properties of thin film ZnO by resonance method

The elastic properties of thin film ZnO have been measured by attaching a Si-ZnO strip to a ceramic bimorph, deflecting the latter with an electric signal and measuring the resonance frequencies of the Si-ZnO strip which are determined by the elastic moduli of ZnO and Si. The elastic modulus of Si is known and hence, from the resonance frequency of the beam, the elastic modulus of ZnO can be calculated. Results obtained are presented in this report.