Sensor Controlled Processes In Chemical Microreactors

New processes in microteclinology such as the LIGA technique [1,2,3], the structuring of photosensitive glass [4] or Laser LIGA [5], now allow low cost mass fabrication of three-dimensional microstructures from a wide variety of materials. Several continuous flow microreactors with integrated analysis systems [6] have been developed. Microminiaturized components for chemical engineering such as mixing units, heating and cooling systems etc. have been fabricated by different microtechniques using photosensitive glass, polymers, ceramics, metals and metal alloys. In this paper microreactors realized in glass and polymers are presented.