Microelectromechanical Scanning Tunneling Microscope

Two Micro-Scanning Tunneling Microscopes (Micro -STMs) have been fabricated and characterized. The integrated Micro-STMs are fabricated from Single Crystal Silicon (SCS) using the high-aspect-ratio SCREAM process. Each Micro-STM includes integrated xy comb drive actuators and a torsional z actuator with integrated cantilever and tunneling or atomic force tip. One Micro-STM measures approximately 200 /spl mu/m on-a-side and is an example of an STM element for an array architecture. Another, larger Micro-STM/AFM measures 2 mm on-a-side including the I mm long cantilever with a 20 nm diameter tip. We demonstrate the operation of this larger STM by STM-imaging a 300 nm metal conductor on a silicon chip.