A High-resolution Laser-based Deflection Measurement System For Characterizing Aluminum Electrostatic Actuators

We present a high resolution, laser based system capable of real-time measurement of the angular deflection of micromechanical actuators with reflective surfaces. The angular resolution is estimated at better than 0.0005 degrees with a bandwidth of 100 kHz. This optical system has been used to study the large and small signal performance of torsional aluminum actuators and to demonstrate optically-based closed-loop control.