Contactless Angle Measurement By Cmos Magnetic Sensor With On Chip Read-out Circuit

We report the implementation of a two-dimensional magnetic vector probe with an industrial CMOS process. The device is intended to be used for miniaturized, contactless and therefore wear-free, angle measurements in automotive and industrial applications, in combination with a permanent magnet. The sensing element is a lateral magnetotransistor with suppressed-sidewall injection and four collectors. On the basis of extensive temperature measurements we integrated an interface circuit including temperature and offset compensation.