A Novel MEMS-Based 13.56 MHz Microantenna for RFID Applications

In this paper, a novel 13.56 MHz microantenna using the microelectromechanical system technology is presented. The microantenna consists of a solenoid-type coil and a high-performance NiZnCu ferrite sheet magnetic core. The overall size of the microantenna is $< 10 \,\, \times \,\, 6.7 \,\, \times \,\, 0.46$ mm³. Test results show that the relative permeability of the ferrite sheet magnetic core reaches 156, and the tangent of loss is $\sim 0.036$ at 13.56 MHz. The microantenna is designed and simulated using the high-frequency structure simulator software. The measurement results show that the sensitivity of the microantenna reaches up to 288.6 mV/ $\mu \text{T}$ , and the communication distance is 52 mm with the power consumption of only 100 mW.